Handbook of Sputter Deposition Technology. Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

Handbook of Sputter Deposition Technology. Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

640 Pages · 2016 · 24.23 MB · English
by Wasa K. & Kanno I. & Kotera H. (Eds.)
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